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    Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting 

    Zhang, Xiao-Sheng (Springer-Verlag Berlin Heidelberg, 2016)
    This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This ...
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    Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition 

    Lyshevski, Sergey Edward (CRC Press, 2015)
    Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality ...

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    AuthorLyshevski, Sergey Edward (1)Zhang, Xiao-Sheng (1)Subject
    Microengineering (2)
    Technique (2)
    Nano (1)Nanotechnology and microengineering (1)... View MoreDate Issued2015 (1)2016 (1)Has File(s)Yes (2)

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