Next Generation Micro/Nano Systems

Abstract

Next Generation Micro/Nano Systems......Page 2. Preface and Committees......Page 5. Table of Contents......Page 8. History and Recent Progress of MEMS Physical Sensors......Page 9. Continuous Process for Large-Area Flexible MEMS......Page 17. Novel Plasmonic Bio-Sensing System Based on Two-Dimensional Gold Patch Arrays for Linear and Nonlinear Regimes......Page 23. Micromachined Devices for Use in Terahertz Applications......Page 28. Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon......Page 36. Wet-Etching Characteristics of SiCN Films Deposited by HWCVD Method......Page 42. Modeling of Piezo-Actuated Stick-Slip Micro-Drives: An Overview......Page 47. Foreign Bodies – The Creation of Symbiotic Jewellery through the Development and Application of Stimulus-Responsive Smart Materials and Microelectromechanical Systems......Page 57.