Please use this identifier to cite or link to this item: https://lib.hpu.edu.vn/handle/123456789/29839
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dc.contributor.editorLorenzelli, Pietro Vincenzini Leandroen_US
dc.date.accessioned2018-03-20T07:28:16Z
dc.date.available2018-03-20T07:28:16Z
dc.date.issued2013en_US
dc.identifier.otherHPU1160591en_US
dc.identifier.urihttps://lib.hpu.edu.vn/handle/123456789/29839-
dc.description.abstractNext Generation Micro/Nano Systems......Page 2. Preface and Committees......Page 5. Table of Contents......Page 8. History and Recent Progress of MEMS Physical Sensors......Page 9. Continuous Process for Large-Area Flexible MEMS......Page 17. Novel Plasmonic Bio-Sensing System Based on Two-Dimensional Gold Patch Arrays for Linear and Nonlinear Regimes......Page 23. Micromachined Devices for Use in Terahertz Applications......Page 28. Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon......Page 36. Wet-Etching Characteristics of SiCN Films Deposited by HWCVD Method......Page 42. Modeling of Piezo-Actuated Stick-Slip Micro-Drives: An Overview......Page 47. Foreign Bodies – The Creation of Symbiotic Jewellery through the Development and Application of Stimulus-Responsive Smart Materials and Microelectromechanical Systems......Page 57.en_US
dc.format.extent118 p.en_US
dc.format.mimetypeapplication/pdfen_US
dc.language.isoenen_US
dc.publisherTrans Techen_US
dc.subjectNano systemsen_US
dc.subjectTechnologyen_US
dc.subjectGeneration microen_US
dc.titleNext Generation Micro/Nano Systemsen_US
dc.typeBooken_US
dc.size17,077 KBen_US
dc.departmentTechnologyen_US
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