Ceramic Thick Films for MEMS and Microdevices

Abstract

Introduction, Pages xvii-xviii. Chapter 1 - Integration and devices: What type of structures are required for thick-film devices, why is it difficult to make them, and how can the challenges be overcome?, Pages 1-33. Chapter 2 - Routes to thick films: What is a thick film? How is it made?, Pages 35-61. Chapter 3 - Thick-film deposition techniques: How to make thick films – the processing techniques used to create films, Pages 63-83. Chapter 4 - Microstructure–property relationships: How the microstructure of the film affects its properties, Pages 85-112. Chapter 5 - Patterning: How to go from a coating to a shape, Pages 113-143. Chapter 6 - Houston, we have a problem: How to fix it when it all goes wrong, Pages 145-166. Chapter 7 - Recipes: Let’s get cooking!, Pages 167-181. Bibliography, Pages 183-185. Index, Pages 187-191.