Browsing by Subject Nanotechnology and Microengineering
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	| Issue Date | Title | Author(s) | 
|---|---|---|
| 2015 | Micro and Nano Fabrication: Tools and Processes | Gatzen, Hans H.; Saile, Volker; Leuthold, Jürg | 
| Issue Date | Title | Author(s) | 
|---|---|---|
| 2015 | Micro and Nano Fabrication: Tools and Processes | Gatzen, Hans H.; Saile, Volker; Leuthold, Jürg |