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https://lib.hpu.edu.vn/handle/123456789/29910| Title: | Micro and Nano Fabrication: Tools and Processes |
| Authors: | Gatzen, Hans H. Saile, Volker Leuthold, Jürg |
| Keywords: | Nanotechnology and Microengineering Manufacturing Machines Nano |
| Issue Date: | 2015 |
| Publisher: | Springer-Verlag Berlin Heidelberg |
| Abstract: | For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control. |
| URI: | https://lib.hpu.edu.vn/handle/123456789/29910 |
| ISBN: | 978-3-662-44394-1 978-3-662-44395-8 |
| Appears in Collections: | Technology |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Micro-and-Nano-Fabrication-619.pdf Restricted Access | 22.72 MB | Adobe PDF |  View/Open Request a copy |
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