Please use this identifier to cite or link to this item: https://lib.hpu.edu.vn/handle/123456789/29910
Title: Micro and Nano Fabrication: Tools and Processes
Authors: Gatzen, Hans H.
Saile, Volker
Leuthold, Jürg
Keywords: Nanotechnology and Microengineering
Manufacturing
Machines
Nano
Issue Date: 2015
Publisher: Springer-Verlag Berlin Heidelberg
Abstract: For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
URI: https://lib.hpu.edu.vn/handle/123456789/29910
ISBN: 978-3-662-44394-1
978-3-662-44395-8
Appears in Collections:Technology

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