Advanced control of of Piezoelectric Micro-/Nano-Positioning Systems

Abstract

This book is focused on enabling technologies in the control implementation of piezoelectric micro-/nano-positioning systems. The book provides a collation of the state of the art of emerging techniques to precision motion control of micro-/nano-positioning systems actuated by PEAs. It covers both feed forward and feed back control strategies for positioning and tracking control of piezoelectric actuation micro-/nano-positioning systems. This book also demonstrates the joint position and force control of piezoelectric micro-/nano-positioning systems in micromanipulation applications. A comprehensive treatment of the subject matter is provided in a manner amenable to readers ranging from researchers to engineers, by providing detailed experimental verifications of the developed approaches.