Nanocantilever beams: modeling, fabrication, and applications

Abstract

Part 1: Techniques for the Fabrication of Nanocantilever Beams. 1. Nanocantilever Beam Fabrication for CMOS. Technology Integration 3. Gemma Rius and Francesc Perez-Murano. 1.1.From Micromechanics to Nanomechanics. 3. 1.2 Lithography-Based Fabrication of Nanomechanical Structures 6. 1.2.1 Process Flow for the Fabrication of Mechanical Devices 7. 1.2.2 Nanolithographies for the Patterning of Nanomechanical Devices.