Nanoimprint Biosensors: The Fusion of Nanofabrication, Nanophotonics, and Nanobiology

Abstract

Preface xiii. Acknowledgement xvii. 1. Nanofabrication and Nanoimprint Technology 1. 1.1 Nanofabrication Technology 1. 1.1.1 Photolithography 2. 1.1.2 X-Ray Lithography 4. 1.1.3 Electron Beam Lithography 4. 1.2 Nanoimprint Technology 6. 1.2.1 Thermal Nanoimprint 6. 1.2.2 UV-Nanoimprint 10. 1.2.3 Other Nanoimprint Technologies 13. 1.2.3.1 Direct metal imprint 13. 1.2.3.2 Soft lithography. (microcontact printing) 14. 1.2.3.3 Molecular imprint 15.