Nanocantilever beams: modeling, fabrication, and applications

dc.contributor.author	Voiculescu, Ioana	en_US
dc.contributor.author	Zaghloul, Mona	en_US
dc.date.accessioned	2018-05-23T09:46:12Z
dc.date.available	2018-05-23T09:46:12Z
dc.date.issued	2016	en_US
dc.identifier.isbn	978-981-4613-24-8	en_US
dc.identifier.isbn	981461324X	en_US
dc.identifier.other	HPU1160752	en_US
dc.identifier.uri	https://lib.hpu.edu.vn/handle/123456789/30941
dc.description.abstract	Part 1: Techniques for the Fabrication of Nanocantilever Beams. 1. Nanocantilever Beam Fabrication for CMOS. Technology Integration 3. Gemma Rius and Francesc Perez-Murano. 1.1.From Micromechanics to Nanomechanics. 3. 1.2 Lithography-Based Fabrication of Nanomechanical Structures 6. 1.2.1 Process Flow for the Fabrication of Mechanical Devices 7. 1.2.2 Nanolithographies for the Patterning of Nanomechanical Devices.	en_US
dc.format.extent	531 p.	en_US
dc.format.mimetype	application/pdf	en_US
dc.language.iso	en	en_US
dc.publisher	Pan Stanford Publishing	en_US
dc.subject	Nanocantilever beams	en_US
dc.subject	Nano	en_US
dc.subject	Technology	en_US
dc.title	Nanocantilever beams: modeling, fabrication, and applications	en_US
dc.type	Book	en_US
dc.size	20,805 KB	en_US
dc.department	Technology	en_US