Micro and Nano Fabrication: Tools and Processes

dc.contributor.author	Gatzen, Hans H.	en_US
dc.contributor.author	Saile, Volker	en_US
dc.contributor.author	Leuthold, Jürg	en_US
dc.date.accessioned	2018-03-27T02:52:59Z
dc.date.available	2018-03-27T02:52:59Z
dc.date.issued	2015	en_US
dc.identifier.isbn	978-3-662-44394-1	en_US
dc.identifier.isbn	978-3-662-44395-8	en_US
dc.identifier.other	HPU1160603	en_US
dc.identifier.uri	https://lib.hpu.edu.vn/handle/123456789/29910
dc.description.abstract	For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.	en_US
dc.format.extent	519 p.	en_US
dc.format.mimetype	application/pdf	en_US
dc.language.iso	en	en_US
dc.publisher	Springer-Verlag Berlin Heidelberg	en_US
dc.subject	Nanotechnology and Microengineering	en_US
dc.subject	Manufacturing	en_US
dc.subject	Machines	en_US
dc.subject	Nano	en_US
dc.title	Micro and Nano Fabrication: Tools and Processes	en_US
dc.type	Book	en_US
dc.size	22,722 KB	en_US
dc.department	Technology	en_US