Next Generation Micro/Nano Systems

dc.contributor.editor	Lorenzelli, Pietro Vincenzini Leandro	en_US
dc.date.accessioned	2018-03-20T07:28:16Z
dc.date.available	2018-03-20T07:28:16Z
dc.date.issued	2013	en_US
dc.identifier.other	HPU1160591	en_US
dc.identifier.uri	https://lib.hpu.edu.vn/handle/123456789/29839
dc.description.abstract	Next Generation Micro/Nano Systems......Page 2. Preface and Committees......Page 5. Table of Contents......Page 8. History and Recent Progress of MEMS Physical Sensors......Page 9. Continuous Process for Large-Area Flexible MEMS......Page 17. Novel Plasmonic Bio-Sensing System Based on Two-Dimensional Gold Patch Arrays for Linear and Nonlinear Regimes......Page 23. Micromachined Devices for Use in Terahertz Applications......Page 28. Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon......Page 36. Wet-Etching Characteristics of SiCN Films Deposited by HWCVD Method......Page 42. Modeling of Piezo-Actuated Stick-Slip Micro-Drives: An Overview......Page 47. Foreign Bodies – The Creation of Symbiotic Jewellery through the Development and Application of Stimulus-Responsive Smart Materials and Microelectromechanical Systems......Page 57.	en_US
dc.format.extent	118 p.	en_US
dc.format.mimetype	application/pdf	en_US
dc.language.iso	en	en_US
dc.publisher	Trans Tech	en_US
dc.subject	Nano systems	en_US
dc.subject	Technology	en_US
dc.subject	Generation micro	en_US
dc.title	Next Generation Micro/Nano Systems	en_US
dc.type	Book	en_US
dc.size	17,077 KB	en_US
dc.department	Technology	en_US