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https://lib.hpu.edu.vn/handle/123456789/30941| Title: | Nanocantilever beams: modeling, fabrication, and applications |
| Authors: | Voiculescu, Ioana Zaghloul, Mona |
| Keywords: | Nanocantilever beams Nano Technology |
| Issue Date: | 2016 |
| Publisher: | Pan Stanford Publishing |
| Abstract: | Part 1: Techniques for the Fabrication of Nanocantilever Beams. 1. Nanocantilever Beam Fabrication for CMOS. Technology Integration 3. Gemma Rius and Francesc Perez-Murano. 1.1.From Micromechanics to Nanomechanics. 3. 1.2 Lithography-Based Fabrication of Nanomechanical Structures 6. 1.2.1 Process Flow for the Fabrication of Mechanical Devices 7. 1.2.2 Nanolithographies for the Patterning of Nanomechanical Devices. |
| URI: | https://lib.hpu.edu.vn/handle/123456789/30941 |
| ISBN: | 978-981-4613-24-8 981461324X |
| Appears in Collections: | Technology |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Nanocantilever-beams-modeling-fabrication-and-applications-786.pdf Restricted Access | 20.8 MB | Adobe PDF |  View/Open Request a copy |
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