Now showing items 1-2 of 2
Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition
(CRC Press, 2015)
Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality ...
Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting
(Springer-Verlag Berlin Heidelberg, 2016)
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This ...